Web2 Zhejiang Hikstor Technology Co. Ltd, Hangzhou 311300, PR China 3 College of Chemistry and Materials Engineering, Zhejiang A&F University, Hangzhou 311300, PR China *E-mail: [email protected] Received: 3 May 2024 / Accepted: 21 June 2024 / … WebZhejiang Hikstor Technology Co. Ltd. Effect of Oxone and Peroxodisulphates on the Chemical Mechanical Polishing Efficiency of C-plane GaN. Yebo Zhu . Hebei University of Technology Preparation of ZnO doped SiO2 Abrasive and Chemical Mechanical Polishing Performance on C-plane Sapphire Substrate.
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